Supporting column and cassette using the same

Supports: racks – Elements

Reexamination Certificate

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Details

C211S041180, C211S040000

Reexamination Certificate

active

07051887

ABSTRACT:
A supporting column (30) of the present invention includes a main body (31) and a stiff shaft (33). The main body (31) includes a half-sleeve shaft (319) and a plurality of parallel wing panels (317) encircling portions of the half-sleeve shaft. The main body has a C-shaped cross section and defines an axial bore along an axis direction. The wing panels are formed perpendicular to the half-sleeve shaft and each wing panel provides a protrusion (318) in the middle of the wing panel. A cassette (40) incorporating the supporting columns is used to accommodate a plurality of substrates.

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patent: 2004/0200788 (2004-10-01), Shon et al.
patent: H04-139741 (1992-05-01), None

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