Supporting apparatus using magnetic power

Details Supporting apparatus using magnetic power Supporting apparatus using magnetic power

1997-06-06

2000-03-21

Ro, Bentsu

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

108146, H01L 2168

Patent

active

060406755

ABSTRACT:
A supporting apparatus for supporting a table having N degrees of freedom, where N is an integer greater than one. The apparatus includes a stage and a leaf spring mounted on the stage. The spring initially contacts the table at a contact point and has a coefficient of elasticity greater in the horizontal direction and smaller in the vertical direction. The spring also has a characteristic of positive rigidity. A pair of permanent magnets are mounted in an area between the stage and table in a vertical direction for counterbalancing the characteristic of positive rigidity of the leaf spring.

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patent: 5780943 (1998-07-01), Ono
patent: 5858587 (1999-01-01), Yamane et al.

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