Supporting apparatus for semiconductor crystal rod

Details Supporting apparatus for semiconductor crystal rod Supporting apparatus for semiconductor crystal rod

1987-12-16

1989-12-12

Straub, Gary P.

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

1566207, 15662073, 15662074, 2484062, 248184, 108102, 108143, 108157, C30B 1300, C30B 1314, C30B 3500

Patent

active

048866474

ABSTRACT:
A supporting apparatus for a semiconductor noncrystal rod comprises a movable ring adapted to move freely in horizontal directions unless it is engaged with the monocrystal rod, a lock means to prevent the movable ring from horizontally moving, and a drive means to elevate the movable ring.

REFERENCES:
patent: Re29824 (1978-11-01), Keller
patent: 3961906 (1976-06-01), Keller
patent: 4045183 (1977-08-01), Barowski et al.
patent: 4060392 (1977-11-01), Herzer et al.
patent: 4186173 (1980-01-01), Jericho et al.
patent: 4257841 (1981-05-01), Russ et al.

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