Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent
1990-04-20
1992-03-31
Spar, Robert J.
Material or article handling
Horizontally swinging load support
Swinging about pivot
414225, 294 88, 2941191, 901 37, 901 32, B25J 1508
Patent
active
051002850
ABSTRACT:
In order to treat disk-shaped bodies, specifically semiconductor disks in a vacuum plant, they must be transported and deposited between stations. A given disk is supported at its edge by two supporting arms each having two fingers and supporting surfaces at four edge sections of the disk distributed along the circumference of the disk. In order to grasp or release the disk by decreasing or increasing the distance between the supporting arms, both supporting arms are mounted to a respective piston/cylinder unit. In such units a respective cylinder moves relative to a stationary piston rod. The ends of both piston rods are thereby mounted oppositely of each other to a rotation axle extending perpendicularly to the axes of the cylinders by means of which the two piston/cylinder units can be pivoted together with the supporting arms from one station to the other station within the vacuum plant. The two piston/cylinder units are operated by a pressurized medium fed via conduits through the hollow piston rods to move the supporting arms away from each other and against the action of a pressure spring positioned inside of the cylinder and resting against the cylinder and the piston and active for the opposed stroke movement.
REFERENCES:
patent: 2789716 (1957-04-01), Wolf
patent: 4252358 (1981-02-01), Klebs
patent: 4336926 (1982-06-01), Inagaki et al.
patent: 4865375 (1989-12-01), Laub et al.
patent: 4913613 (1990-04-01), Hirschmann
patent: 4990047 (1991-02-01), Wagner et al.
Hansen, H. E. et al., "Convertible Wafer Size Gripper Assembly", IBM Technical Disclosure Bulletin, vol. 22, No. 1, Jun. 1979.
Balzers Aktiengesellschaft
Hienz William M.
Spar Robert J.
LandOfFree
Supporting and transport apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Supporting and transport apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Supporting and transport apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2255006