Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond
Patent
1979-03-29
1981-03-03
Herbert, Jr., Thomas J.
Stock material or miscellaneous articles
Structurally defined web or sheet
Discontinuous or differential coating, impregnation or bond
250482, 250492A, 250505, 355125, 427250, 427259, 4273897, 428379, B32B 1508, B32B 2700
Patent
active
042541743
ABSTRACT:
A process for fabricating polyimide membrane x-ray lithography masks is described. Thin membrane of polyimide is formed by spinning polyamic acid on a glass substrate and polymerizing in situ. The glass substrate acts as a holder and efficient heat sink during formation of gold absorber patterns on top of the polyimide. A support ring is then bonded to the polyimide, and the glass etched in dilute HF. Optically smooth polyimide membranes with thickness from 0.5 to 5 .mu.m are readily achieved. The method and resulting product is not limited to the above materials or to masks.
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patent: 3179635 (1965-04-01), Frost et al.
patent: 3742230 (1973-06-01), Spears et al.
patent: 3743842 (1973-07-01), Smith et al.
patent: 3892973 (1975-07-01), Coquln et al.
patent: 4057659 (1977-11-01), Pammer et al.
DaLomba Muriel A.
Flanders Dale C.
Smith Henry I.
Herbert, Jr. Thomas J.
Massachusetts Institute of Technology
Santa Martin M.
Smith, Jr. Arthur A.
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