Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-03-07
2006-03-07
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C359S611000
Reexamination Certificate
active
07009687
ABSTRACT:
Exposure light can pass through a partition wall parallel plate via the opening of the second wall and the opening of the first wall, the first opposing surface of the first wall and the second opposing surface of the second wall respectively oppose one surface and the other surface of the partition wall parallel plate via the first clearance and the second clearance, and the partition wall parallel plate is supported at least at three points such that the third opposing surface of the third wall opposes the entire peripheral surface of the partition wall parallel plate. Further, the third clearance is connected to an exhaust route. Specifically, unnecessary stress is not applied to the partition wall parallel plate, and even if gas tries to flow from space on one side of the partition wall parallel plate into the other space, mixing of gases between two spaces can be effectively suppressed because gas in the third clearance is forcibly exhausted outside via the exhaust route.
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Nguyen Henry Hung
Nikon Corporation
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