Support post architecture for micromechanical devices

Details Support post architecture for micromechanical devices Support post architecture for micromechanical devices

1994-11-02

1997-07-22

Dzierzynski, Paul M.

Optical: systems and elements

Mirror

With support

359872, 359883, 359224, 359295, 359291, 359292, 359293, 348771, G02B 7182, G02B 508, G02B 2608, G02B 2600

Patent

active

056508816

ABSTRACT:
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, holes 434 are patterned into the spacer layer to remove any spacer material that is covering the pillars. The spacer layer is then reflowed to fill the holes and lower the surface of the spacer layer such that the surface is coplanar with the tops of the support pillars 426.

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