Support post architecture for micromechanical devices

Details Support post architecture for micromechanical devices Support post architecture for micromechanical devices

1994-11-02

1997-12-30

Dzierzynski, Paul M.

Optical: systems and elements

Mirror

With support

359872, 359883, 359884, 359224, 359295, 359291, G02B 7182, G02B 508, G02B 2608, G02B 2600

Patent

active

057037280

ABSTRACT:
A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.

REFERENCES:
patent: 4441791 (1984-04-01), Hornbeck
patent: 4954789 (1990-09-01), Sampsell
patent: 5061049 (1991-10-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5202785 (1993-04-01), Nelson
patent: 5233456 (1993-08-01), Nelson
patent: 5485304 (1996-01-01), Kaeriyama
patent: 5535047 (1996-07-01), Hornbeck

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