Support plate, exposure apparatus having the support plate,...

Details Support plate, exposure apparatus having the support plate,... Support plate, exposure apparatus having the support plate,...

2008-08-26

2011-10-25

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

08045138

ABSTRACT:
An exposure apparatus exposes a substrate through a liquid. The apparatus includes a stage that holds the substrate and moves, and a support plate disposed on the stage and around the periphery of the substrate and supporting the liquid together with the substrate. The support plate includes a liquid-repellent structure portion on the surface of which is formed a texture repellent to the liquid, and a flat portion on the surface of which is formed a film repellent to the liquid.

REFERENCES:
patent: 7532309 (2009-05-01), Poon et al.
patent: 2007/0242242 (2007-10-01), Nagasaka
patent: 2008/0043210 (2008-02-01), Shibuta
patent: 2008/0068567 (2008-03-01), Nagasaka et al.
patent: 2006-319065 (2006-11-01), None
patent: 2005-055296 (2005-06-01), None
patent: 2006-093340 (2006-09-01), None

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