Support mechanism, exposure apparatus having the same, and...

Details Support mechanism, exposure apparatus having the same, and... Support mechanism, exposure apparatus having the same, and...

2006-10-06

2010-06-29

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Lens

With support

C359S822000, C359S819000, C359S823000

Reexamination Certificate

active

07746575

ABSTRACT:
A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

REFERENCES:
patent: 5475661 (1995-12-01), Tomita et al.
patent: 6151174 (2000-11-01), Hendriks
patent: 2003/0234918 (2003-12-01), Watson
patent: 2004/0008429 (2004-01-01), Watson et al.
patent: 2004/0059444 (2004-03-01), Tsukakoshi
patent: 2000193869 (2000-07-01), None
patent: 2000206389 (2000-07-01), None
JP Office Action (Dec. 3, 2005).

Affiliated with

Also associated with

Rating

Support mechanism, exposure apparatus having the same, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Support mechanism, exposure apparatus having the same, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Support mechanism, exposure apparatus having the same, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4156138