Support mechanism, exposure apparatus having the same, and...

Details Support mechanism, exposure apparatus having the same, and... Support mechanism, exposure apparatus having the same, and...

2006-11-21

2006-11-21

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

With support

C359S819000, C359S822000, C359S823000

Reexamination Certificate

active

07139137

ABSTRACT:
A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

REFERENCES:
patent: 2003/0234918 (2003-12-01), Watson
patent: 2004/0008429 (2004-01-01), Watson et al.
patent: 2004/0059444 (2004-03-01), Tsukakoshi
patent: 2000-193869 (2000-07-01), None
patent: 2000-206389 (2000-07-01), None

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