Support frame for supporting a semiconductor wafer carrier

Details Support frame for supporting a semiconductor wafer carrier Support frame for supporting a semiconductor wafer carrier

1990-02-27

1991-05-07

Wolfe, Robert L.

Supports: racks

Special article

Platelike

A47G 1908

Patent

active

050129350

ABSTRACT:
A support frame for a semiconductor wafer carrier is disclosed, which comprises a guide means to guide and hold said carrier in position and a wafer stopper means located in the central area of the support frame for washing or other processing of semiconductor wafers housed in a carrier located in a vessel. The respective semiconductor wafers housed in a carrier located in position in the support frame are slightly lifted with the lowermost portion of the wafers abutting against the wafer stopper means to thereby contact the whole surface of the wafers with the liquid in a vessel.

REFERENCES:
patent: 3850296 (1974-11-01), Hirata
patent: 4569452 (1986-02-01), Schulke
patent: 4672509 (1987-06-01), Sperca
patent: 4949848 (1990-08-01), Kos

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