Support frame for substrates

Details Support frame for substrates Support frame for substrates

1999-09-21

2000-11-21

Bratlie, Steven A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118729, 432121, F27D 500

Patent

active

061493651

ABSTRACT:
The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing chamber. In one embodiment, the support frame comprises one or more longitudinal members coupled to one or more transverse members. The transverse members preferably define a supporting surface on which a heated susceptor is mounted. The longitudinal member is preferably disposed below the heated susceptor, thus minimizing thermal expansion of the longitudinal member. Spacers made of thermally conductive material may be disposed at appropriate locations along the members to provide more uniform distribution of heat within the members.

REFERENCES:
patent: 4455467 (1984-06-01), Dills
patent: 5000113 (1991-03-01), Wang et al.
patent: 5044943 (1991-09-01), Bowman et al.
patent: 5332443 (1994-07-01), Chew et al.
patent: 5421893 (1995-06-01), Perlow
patent: 5611865 (1997-03-01), White et al.
patent: 5820686 (1998-10-01), Moore

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