Measuring and testing – Volume or rate of flow – Thermal type
Patent
1989-11-20
1991-07-02
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
050276522
ABSTRACT:
A support for sensor elements, especially temperature, throughflow or chemical sensors, comprises a supporting element composed of a ceramic material and having at least one throughgoing opening, a thin ceramic foil arranged on the supporting element so as to cover the opening to support a sensor element in the region of the opening.
REFERENCES:
patent: 4320655 (1982-03-01), Kammermaier et al.
patent: 4471647 (1984-09-01), Jerman et al.
patent: 4633578 (1987-01-01), Aine et al.
patent: 4680963 (1987-07-01), Tabata et al.
patent: 4783996 (1988-11-01), Ohta et al.
Goebel Ulrich
Holland Martin
Muehlheim Richard
Ziegenbein Botho
Goldstein Herbert
Robert & Bosch GmbH
Striker Michael J.
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