Support element for an automatic load platform of a silicon wafe

Details Support element for an automatic load platform of a silicon wafe Support element for an automatic load platform of a silicon wafe

1995-09-11

1996-11-05

Berman, Jack I.

Radiant energy

Supported for nonsignalling objects of irradiation

355 72, H01L 2168

Patent

active

055720366

ABSTRACT:
A support element of an automatic load platform of a silicon wafer exposure unit, having a circular cross-section, with a first outer diameter adapted to the guide of a load station, which diameter is smaller than that of a silicon wafer, wherein the circular disc of the support element has at its circumference in a direction parallel to the insertion direction of the load station at least partly enlarged portions and therewith a second outer diameter which corresponds approximately to that of the silicon wafer, and wherein the greatest width of the support element at right angles to the insertion direction corresponds to that of the circular disc.

REFERENCES:
patent: 4910549 (1990-03-01), Sugita
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5195862 (1993-03-01), Cruz
patent: 5374829 (1994-12-01), Sakamoto et al.

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