Support device for sputtering machine

Details Support device for sputtering machine Support device for sputtering machine

2009-06-01

2011-12-06

Thomas, David B (Department: 3723)

Work holders

Holder mounted for movement

Relative to a station

C204S298270

Reexamination Certificate

active

08070146

ABSTRACT:
A support device used in sputtering machine includes a chamber housing, a frame, at least one holding device, a first and second driving assemblies. The frame is rotatably mounted in the chamber housing. The holding device is rotatably mounted on the frame. The first driving assembly is received in the chamber housing and includes a first motor mounted on the chamber housing and a first shaft installed on the first motor. The first driving assembly is configured for driving the frame rotating in a plane by the first shaft. The second driving assembly is received in the chamber housing and includes a second motor mounted on the chamber housing and second shaft installed on the second motor. The second shaft adjacently parallels to the first shaft. The second driving assembly is configured for driving the at least one holding device rotating in a plane perpendicular to the rotating plane of the frame.

REFERENCES:
patent: 5662785 (1997-09-01), Schertler
patent: 6740209 (2004-05-01), Shibamoto et al.
patent: 6911671 (2005-06-01), Marcus et al.
patent: 2005/0139467 (2005-06-01), Takahashi

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