Support device and lightographic apparatus

Details Support device and lightographic apparatus Support device and lightographic apparatus

2007-01-30

2007-01-30

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000

Reexamination Certificate

active

11009549

ABSTRACT:
To correctly transfer a pattern to a substrate, or transfer any other pattern having small features, a transfer of vibrations from an external support structure, e.g. a floor, is minimized by using a vibration isolation support device, e.g. an airmount. To improve the vibration isolation characteristics of the airmount, the (positive) stiffness of the airmount is lowered by providing a pressure reducer that is configured to reduce a gas pressure change in a gas chamber of the airmount, which pressure change is a result of a volume change of the gas chamber. Due to vibrations the volume of said gas chamber changes. Due to the stiffness reduction device, the corresponding pressure change, and thus a force exerted on the supported object, is reduced, thereby reducing the stiffness of the airmount.

REFERENCES:
patent: 6816232 (2004-11-01), Takahashi et al.
patent: 6953109 (2005-10-01), Watson et al.

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