Heating – Work feeding – agitating – discharging or conveying...
Patent
1996-05-28
1999-04-27
Bennett, Henry A.
Heating
Work feeding, agitating, discharging or conveying...
432241, F27D 312
Patent
active
058973117
ABSTRACT:
A support boat for objects-to-be-processed including a plurality of support shelves formed in multi-stages spaced from each other by a vertical pitch for mounting a plurality of objects-to-be-processed which are to be heat treated in a vertical heat treatment apparatus; and a plurality of support bars for interconnecting the support shelves vertically spaced from each other and holding the same, the support boat comprising a light shielding plate disposed above an uppermost one or below a lowermost one of the support shelves for blocking heat rays from a heater for heating, whereby abrupt heating of central parts of those of the objects-to-be-processed which are positioned near the top or the bottom of the support boat is suppressed, and all the objects-to-be-processed can have substantially the same heat history.
REFERENCES:
patent: 4943234 (1990-07-01), Sohlbrand
patent: 5316472 (1994-05-01), Niino et al.
patent: 5360336 (1994-11-01), Monoe
patent: 5516283 (1996-05-01), Schrems
patent: 5556275 (1996-09-01), Sakata et al.
Bennett Henry A.
Tokyo Electron Limited
Wilson Gregory A.
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