Superlattice strain gage

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310338, 310339, 310357, 310332, 73774, 73775, 73800, H01L 4108

Patent

active

049123556

ABSTRACT:
A strain gage comprising a strained-layer superlattice crystal exhibiting piezoelectric properties is described. A substrate upon which such a strained-layer superlattice crystal has been deposited is attached to an element to be monitored for strain. A light source is focused on the superlattice crystal and the light reflected from, passed through, or emitted from the crystal is gathered and compared with previously obtained optical property data to determine the strain in the element.

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