Superlattice piezoelectric devices

Details Superlattice piezoelectric devices Superlattice piezoelectric devices

1984-10-09

1986-05-20

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, 310358, 310800, H01L 4108

Patent

active

045903999

ABSTRACT:
Piezoelectric transducers and oscillators made from amorphous superlattice structures are disclosed. These materials have large built-in fields necessary for piezoelectricity but they are materials which can be deposited at low temperatures onto virtually any substrate.

REFERENCES:
patent: 3543058 (1970-11-01), Klemens
patent: 4427913 (1984-01-01), Iafrate et al.
patent: 4469977 (1984-09-01), Quinn et al.

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