Superlattice geometry and devices

Details Superlattice geometry and devices Superlattice geometry and devices

1984-09-14

1986-05-27

Edlow, Martin H.

357 16, 357 17, H01L 2712

Patent

active

045918899

ABSTRACT:
Semiconductor devices having submonolayer superlattices are described. These devices may have periodic compositional variations in a direction parallel to the substrate surface as well as in the perpendicular direction. Such superlattices are useful in numerous types of devices including lasers, transistors, etc.

REFERENCES:
patent: 3310439 (1967-03-01), Seney
patent: 4050964 (1977-09-01), Rode
patent: 4137542 (1979-01-01), Chang et al.
patent: 4205329 (1980-05-01), Dingle et al.
patent: 4503447 (1985-03-01), Iafrate et al.

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