Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Cellular products or processes of preparing a cellular...
Reexamination Certificate
2006-04-18
2006-04-18
Tran, Michael (Department: 2818)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Cellular products or processes of preparing a cellular...
C438S778000, C438S780000, C438S783000, C521S086000, C521S097000
Reexamination Certificate
active
07030168
ABSTRACT:
Supercritical fluid-assisted deposition of materials on substrates, such as semiconductor substrates for integrated circuit device manufacture. The deposition is effected using a supercritical fluid-based composition containing the precursor(s) of the material to be deposited on the substrate surface. Such approach permits use of precursors that otherwise would be wholly unsuitable for deposition applications, as lacking requisite volatility and transport characteristics for vapor phase deposition processes.
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Baum Thomas H.
Xu Chongying
Advanced Technology & Materials Inc.
Berry Renee R.
Boyd John
Chappuis Margaret
Fuierer Tristan A.
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