Superconductor deposition system

Details Superconductor deposition system Superconductor deposition system

1990-12-24

1993-05-04

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

118620, 118727, 505 1, 20429809, 20429828, B05D 306, C23C 1400

Patent

active

052078841

ABSTRACT:
To deposit a plurality of substances on a substrate while the substrate remains in a low pressure oxygen environment, several target carriers are mounted around the edge of a disc and the disc is rotated to position the targets at the focal point of a fixed laser. The target carriers are themselves rotatable in bearings on the disc and are turned by a sun gear that is carried about the same shaft that turns the disc so that the heat of the laser beam is not concentrated at one spot on the surface of the target. All the apparatus is contained in a oxygen chamber. The substrate is heated and the targets are cooled continuously.

REFERENCES:
patent: 4664940 (1987-05-01), Bensoussan et al.
patent: 4793908 (1988-12-01), Scott et al.
patent: 4892751 (1990-01-01), Miyake et al.
patent: 4923585 (1990-05-01), Krauss et al.
patent: 5015492 (1991-05-01), Venkatesan et al.
Ying et al., ". . . study . . . YBaCuO", Appl. Phys. Lett. 53(18), Oct. 1988, pp. 1762-1764.
Neifeld et al., "Systematics . . . SmBa.sub.2 Cu.sub.3 O.sub.7 ", Appl. Phys. Lett. 53(8), Aug. 1988, pp. 703-704.
Campers et al., "YBaCuO . . . evaporation", Appl. Phys. Lett. 52(7), Feb. 1988, pp. 584-586.
Lynds et al., "High T.sub.c . . . Ablation", American Inst. of Phys., Conf. Proceed. No. 165, Nov. 1987, Anaheim, Calif. 1987.

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