Superconductor-based modulator for extreme ultraviolet (EUV)

Optical: systems and elements – Optical modulator

Reexamination Certificate

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C359S288000

Reexamination Certificate

active

11241588

ABSTRACT:
A superconductor-based modulator includes a superconductor coupled to a cold reservoir to receive extreme ultra-violet (EUV) light beams. The light beams are modulated by altering transmission and reflection properties of the superconductor. Magnetic field, temperature, or a combination of both, may be used to control the superconducting properties of the superconductor. The modulator may perform temporal, spatial, and grey-scale modulations. The surface of the superconductor may be patterned with heat or infrared radiation to facilitate light focusing.

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