Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1983-01-17
1985-08-20
Bueker, Richard
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 63, 427 96, 156643, H01L 3922
Patent
active
045364141
ABSTRACT:
A superconductive tunnel junction device comprises first and second superconductive electrodes with a barrier disposed therebetween where the first superconductive electrode and the barrier are formed without interruption in the same vacuum system pump down and with the first superconductive electrode subjected to sputter etching in an argon plasma before the deposition of the barrier for improving the characteristics of the device.
REFERENCES:
patent: 4333808 (1982-06-01), Bhattacharyya
patent: 4351712 (1982-09-01), Cuomo et al.
patent: 4421785 (1983-12-01), Kroger
Broom et al., IBM J. Res. Develop., vol. 24, No. 2, Mar. 1980.
Jillie Don W.
Kroger Harry
Smith Lawrence N.
Bueker Richard
Cooper Albert B.
Sperry Corporation
Terry Howard P.
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