Superconductive tunnel junction device and method of manufacture

Details Superconductive tunnel junction device and method of manufacture Superconductive tunnel junction device and method of manufacture

1980-08-18

1983-12-20

Lusignan, Michael R.

Coating processes

Electrical product produced

Superconductor

427 85, 427 86, 427 88, 427 89, 427 93, 427 96, 427404, 4274193, B05D 512

Patent

active

044217854

ABSTRACT:
A Josephson tunnel junction device having niobium nitride superconductive electrodes includes a polycrystalline semiconductor tunneling barrier therebetween comprised of silicon, germanium, or an alloy thereof preferably deposited on the lower superconductive electrodes by vapor deposition. The barrier thickness of the junction is controlled by precision doping of the semiconductor material. The active junction is defined after the interfaces between the barrier material and the two superconductor lines are formed, retaining those active interfaces in fully unpolluted character.

REFERENCES:
patent: 3911168 (1975-10-01), Schinella et al.
patent: 4176365 (1979-11-01), Kroger
patent: 4214919 (1980-07-01), Young
patent: 4246296 (1981-01-01), Chang
Walter, IBM Tech. Dis. Bul. vol 18, No. 7, 1975, p. 2328.

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