Superconducting thin film fabrication

Details Superconducting thin film fabrication Superconducting thin film fabrication

1988-02-26

1990-05-29

Weisstuch, Aaron

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

20419224, 428701, 428930, 505813, 505816, H01L 3912, H01L 3924, C23C 1434

Patent

active

049295950

ABSTRACT:
An improved fabrication of superconducting films is disclosed whereby a multi-phase Y-Ba-Cu-O compound is utilized. The film is formed by sputtering of a target material consisting of the superconducting 123 phase Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 onto the green 211 phase Y.sub.2 BaCuO.sub.5. After annealing, the superconducting characteristics, of the formed film, in terms of transition width and T.sub.c, are improved over those using other oxide compounds as substrates.

REFERENCES:
W. N. Wang et al., Jap. J. Appl. Phys., vol. 27, No. 7, Jul. 1988, pp. L1268-L1270.
K. Yoshihara et al., Jap. J. Appl. Phys., vol. 27, No. 8, Aug. 1988, pp. L1492-L1494.
C. A. Chang et al., Appl. Phys. Lett., vol. 52, No. 1, Jan. 1988, pp. 72-74.
H. Koinuma et al., Jap. J. Appl. Phys., vol. 26, May 1987, pp. L763-L765.
H. Koinuma et al., Jap. J. Appl. Phys., vol. 27, Jul. 1988, pp. L1216-L1218.
M. K. Wu et al., Appl. Phys. Lett., vol. 52, May 1988, pp. 1915-1917.

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