Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1987-03-19
1989-07-04
Swisher, Nancy A. B.
Stock material or miscellaneous articles
Composite
Of inorganic material
428699, 428700, B32B 1504
Patent
active
048449890
ABSTRACT:
A superconducting structure is formed by depositing alternate layers of aluminum nitride and niobium nitride on a substrate. Deposition methods include dc magnetron reactive sputtering, rf magnetron reactive sputtering, thin-film diffusion, chemical vapor deposition, and ion-beam deposition. Structures have been built with layers of niobium nitride and aluminum nitride having thicknesses in a range of 20 to 350 Angstroms. Best results have been achieved with films of niobium nitride deposited to a thickness of approximately 70 Angstroms and aluminum nitride deposited to a thickness of approximately 20 Angstroms. Such films of niobium nitride separated by a single layer of aluminum nitride are useful in forming Josephson junctions. Structures of 30 or more alternating layers of niobium nitride and aluminum nitride are useful when deposited on fixed substrates or flexible strips to form bulk superconductors for carrying electric current. They are also adaptable as voltage-controlled microwave energy sources.
REFERENCES:
patent: 3922475 (1975-11-01), Manasevit
patent: 4189516 (1980-02-01), Dryburgh et al.
patent: 4218507 (1980-08-01), Deffeyes et al.
patent: 4437227 (1984-03-01), Flannery et al.
Ketterson John B.
Lepetre Yves J.
Murduck James M.
Schuller Ivan K.
Rechtin Michael D.
Swisher Nancy A. B.
The University of Chicago (Arch Development Corp.)
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