Superconducting magnesium boride thin-film and process for...

Superconductor technology: apparatus – material – process – High temperature devices – systems – apparatus – com- ponents,... – Superconductor next to layer containing nonsuperconducting...

Reexamination Certificate

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C505S100000, C505S237000, C505S473000, C428S697000, C428S698000, C428S701000, C427S251000, C427S255380, C427S593000, C427S596000, C427S062000

Reexamination Certificate

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07985713

ABSTRACT:
A magnesium boride thin film having a B-rich composition represented by the general formula of MgBx(x=1 to 10) and a superconducting transition temperature of 10K or more has superior crystallinity and orientation and is used as a superconducting material. This thin film is formed by maintaining a film forming environment in a high vacuum atmosphere of 4×10−5Pa or less, and simultaneously depositing Mg and B on a substrate maintained at a temperature of 200° C. or less so as to grow the film at a growth rate of 0.05 nm/sec or less. It is preferable to supply an Mg vapor and a B vapor into the film forming environment at an Mg/B molar ratio of 1/1 to 12/1.

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International Search Report of PCT/JP2006/306397, date of mailing Jun. 20, 2006.

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