Superconducting field effect transistor with increased channel l

Details Superconducting field effect transistor with increased channel l Superconducting field effect transistor with increased channel l

1993-08-30

1995-01-10

Hille, Rolf

Superconductor technology: apparatus, material, process

High temperature devices, systems, apparatus, com- ponents,...

Semiconductor thin film device or thin film electric...

505191, 505220, 505238, 257 36, 257 39, H01L 3922, B05D 512, H01B 1200

Patent

active

053807049

ABSTRACT:
Disclosed herein is a superconducting field effect transistor (FET) which has at least an active region formed from a film of oxide normal conductor, a plurality of electrodes formed from a film of oxide superconductor, and a means to control the current which flows between the electrodes through the active region. Having a much greater electrode distance than the conventional superconducting device, it can be produced easily by lithography without resorting to special techniques.

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