Superconducting circuit elements with metallic substrate and met

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505701, 257 33, 257 35, 257 39, 427 62, H01L 3914, H01L 3922, H01B 1200, B05D 512

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active

052665585

ABSTRACT:
These superconducting circuit elements, namely SNS heterostructures, such as, e.g. Josephson junctions and field-effect transistors, have a sandwich structure consisting of at least one layer of high-T.sub.c superconductor material arranged adjacent to a metallic substrate, possibly with an insulating layer in between, the substrate, the superconductor and--if present--the insulator all consisting of materials having at least approximately matching molecular structures and lattice constants. Electrical contacts, such as source, drain and gate electrodes are attached to the superconductor layer and to the substrate, respectively. The electrically conductive substrate consists of a metallic oxide such as strontium ruthenate Sr.sub.2 RuO.sub.4, whereas the superconductor layer is of the copper oxide type and may be YBa.sub.2 Cu.sub.3 O.sub.7-.delta., for example. The insulator layer (10) may consist of SrTiO.sub.3. The manufacture of these devices starts with the preparation of the substrate material from a 2:1,1 molar ratio of SrCO.sub.3 to RuO.sub.2 and involves a floating zone melting process yielding single crystals of the strontium ruthenate Sr.sub.2 RuO.sub.4 material onto whose (001) surface the superconductor layer as well as the barrier layer can be epitaxially deposited.

REFERENCES:
patent: 4994435 (1991-02-01), Shiga et al.
Hebard et al., "Experimental Considerations in the Quest for a Thin-Film Superconducting Field-Effect Transistor", IEEE Trans. on Mag., vol. Mag-23, No. 2, Mar. 1987, pp. 1279-1282.
J. J. Randall et al., "Preparation of Some Ternary Oxides of the Platinum Metals".
Journal of American Chemical Society, vol. 81, Jun. 5, 1959, pp. 2629-2631.

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