Superconducting alloys comprising tungsten, molybdenum, silicon

Details Superconducting alloys comprising tungsten, molybdenum, silicon Superconducting alloys comprising tungsten, molybdenum, silicon

1989-11-17

1991-05-07

Roy, Upendra

Alloys or metallic compositions

Tungsten base

20419224, 357 4, 420429, 420431, 420901, 427 62, 428620, 428660, H01L 3922, H01L 2712, B32B 906

Patent

active

050135260

ABSTRACT:
A superconducting material made of tungsten or molybdenum containing a specified amount of silicon, a wiring made of this superconducting material, and a semiconductor device using this wiring.
The above-mentioned superconducting material undegoes no damage even in the steps of heat treatments effected after the formation of a wiring therefrom by virtue of its high melting point, and can be very easily patterned by reactive ion etching using SF.sub.6 as an etching gas, which has heretofore been generally employed. These features, in which conventional superconducting materials are lacking, allow the superconducting material of the present invention to exhibit excellent properties particularly when used in the wirings of a semiconductor device.

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