Superachromatic UV and visible focusing objective lens

Details Superachromatic UV and visible focusing objective lens Superachromatic UV and visible focusing objective lens

1992-07-31

1994-04-19

Ben, Loha

Optical: systems and elements

Having significant infrared or ultraviolet property

Lens, lens system or component

359722, 359740, 359784, G02B 1314, G02B 1300, G02B 908, G02B 912

Patent

active

053051386

ABSTRACT:
A superachromatic focusing objective lens which focuses wavelengths extending between the ultraviolet and the visible wavelength spectrum and is able to achieve superachromatic correction for three wavelengths within the visible spectrum is disclosed. The present objective lens includes an achromatic lens to assist in the correction spherical and coma aberration, a modified gauss for minimizing spherochromatism, a reversed modified gauss for adding symmetry to aid in the correction of coma, distortion and lateral color aberrations, and a stop located between the modified gauss and the reverse modified gauss. A glass plate is provided for forming a splatter shield to protect the lens from debris, and may be used to define one wall of a vacuum chamber. The elements of the objective lens may be made from various glasses to include calcium fluoride, quartz, and barium fluoride.

REFERENCES:
patent: 3348896 (1967-10-01), Betensky
patent: 3391968 (1968-07-01), Betensky
patent: 4702569 (1987-10-01), Mercado et al.
patent: 4704011 (1987-11-01), Mercado
patent: 4871243 (1989-10-01), Ogawa et al.
patent: 4955701 (1990-09-01), Kataoka et al.
patent: 5159496 (1992-10-01), Kataoka
patent: 5172275 (1992-12-01), De Jager
IBM Technical Disclosure Bulletin, vol. 33, No. 4, Sep. 1990, pp. 206-207, Herring et al. Excimer Laser Objective Lens.

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