Super hard highly pure silicon nitrides and a process and appara

Details Super hard highly pure silicon nitrides and a process and appara Super hard highly pure silicon nitrides and a process and appara

1980-01-28

1982-07-20

Bernstein, Hiram

Chemical apparatus and process disinfecting, deodorizing, preser

Physical type apparatus

Crystallizer

156DIG99, C30B 3500

Patent

active

043405681

ABSTRACT:
A super hard-highly pure silicon nitride includes a preferentially oriented crystalline silicon nitride having a grain size of 1-50 .mu.m and a micro Vickers hardness of 5,000 kg/mm.sup.2 under a load of 100 g, a finely grained crystalline silicon nitride having an average grain size of less than 1 .mu.m and a micro Vickers hardness of 3,500 kg/mm.sup.2 under a load of 100 g, and an amorphous silicon nitride having a micro Vickers hardness of 2,200 kg/mm.sup.2 under a load of 100 g, and is produced by blowing a nitrogen depositing source and a silicon depositing source on a substrate heated at 500.degree.-1,900.degree. C. with a blowpipe composed of a pipe assembly wherein a first pipe for the nitrogen depositing source is surrounded with a second pipe for the silicon depositing source and the distance from an opening end of the first pipe to the substrate is shorter than the distance from an opening end of the second pipe to the substrate.

REFERENCES:
patent: 3297501 (1967-01-01), Reisman
patent: 3365316 (1968-01-01), Kingery
Whitner, Western Elec. Co. Inc., Tech. Dig #11, Jul., 1968 pp. 5-6.
Aboaf, J. Electrochim Soc., V 116 #12, 11735-40, Solid State Physics, 12/66.
Gricio, J. Electrochem Soc. Electrochem Sci., V 115#5, pp. 525-531, 1969.

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