Sunken electrode configuration for MEMs Micromirror

Details Sunken electrode configuration for MEMs Micromirror Sunken electrode configuration for MEMs Micromirror

2007-11-27

2007-11-27

Bovernick, Rodney (Department: 2874)

Optical waveguides

With optical coupler

Switch

C359S290000, C359S295000

Reexamination Certificate

active

10944838

ABSTRACT:
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.

REFERENCES:
patent: 5867302 (1999-02-01), Fleming
patent: 6327855 (2001-12-01), Hill et al.
patent: 6442307 (2002-08-01), Carr et al.
patent: 6454421 (2002-09-01), Yu et al.
patent: 6491404 (2002-12-01), Hill
patent: 6529652 (2003-03-01), Brener
patent: 6533947 (2003-03-01), Nasiri et al.
patent: 6535319 (2003-03-01), Buzzetta et al.
patent: 6625342 (2003-09-01), Staple et al.
patent: 6744550 (2004-06-01), Neukermans et al.
patent: 6825967 (2004-11-01), Chong et al.
patent: 6856068 (2005-02-01), Miller et al.
patent: 6869815 (2005-03-01), Gasparyan et al.
patent: 2002/0097952 (2002-07-01), Jin et al.
patent: 2002/0122217 (2002-09-01), Nakajima
patent: 2002/0126455 (2002-09-01), Wood
patent: 2002/0146200 (2002-10-01), Kudrle et al.
patent: 2003/0012486 (2003-01-01), Ducellier et al.
patent: 2003/0035192 (2003-02-01), Mizuno et al.
patent: 2003/0052569 (2003-03-01), Dhuler et al.
patent: WO01/61400 (2001-08-01), None
patent: WO01/73934 (2001-10-01), None

Affiliated with

Also associated with

Rating

Sunken electrode configuration for MEMs Micromirror does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Sunken electrode configuration for MEMs Micromirror, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sunken electrode configuration for MEMs Micromirror will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3806742