Sunken electrode configuration for MEMs micromirror

Details Sunken electrode configuration for MEMs micromirror Sunken electrode configuration for MEMs micromirror

2007-04-10

2007-04-10

Connelly-Cushwa, Michelle (Department: 2874)

Optical waveguides

Miscellaneous

C385S018000, C359S225100

Reexamination Certificate

active

11437652

ABSTRACT:
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror's angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.

REFERENCES:
patent: 4943750 (1990-07-01), Howe et al.
patent: 6914712 (2005-07-01), Kurosawa

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