Sulfuric acid reprocessor with continuous purge of second distil

Details Sulfuric acid reprocessor with continuous purge of second distil Sulfuric acid reprocessor with continuous purge of second distil

1990-02-15

1991-10-29

Bascomb, Jr., Wilbur

Distillation: apparatus

Apparatus

Systems

202159, 202177, 202183, 2021856, 202197, 202205, 2022671, 156642, 159DIG19, 203 4, 203 12, 203 40, 203 42, 203 80, 203 86, 203DIG2, 203DIG9, 423531, B01D 310, C01B 1790

Patent

active

050613480

ABSTRACT:
An apparatus and method for reprocessing waste piranha containing contaminated H.sub.2 SO.sub.4 from, for example, a semiconductor processing operation is described. The apparatus and method include a first distillation flask which is maintained under a substantial vacuum. The first distillation flask includes a first column packed with a column packing material and an input pipe for refluxing to retard loss of H.sub.2 SO.sub.4 in the first distillation. The second distillation flask boils off substantially pure H.sub.2 SO.sub.4 and provides for a continuous automatic purge of the contaminants from the second distillation flask thus improving the purity of the H.sub.2 SO.sub.4. The substantially pure H.sub.2 SO.sub.4 flows through a column which is coupled to a condenser which condenses substantially pure H.sub.2 SO.sub.4.

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