Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2005-07-12
2005-07-12
Webb, Gregory (Department: 1751)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C510S505000, C134S038000, C134S040000
Reexamination Certificate
active
06916772
ABSTRACT:
The present invention relates to, inter alia, a composition for stripping photoresist from substrates comprising: about 5% to about 50% by weight of an alkyl substituted pyrrolidone, an alkyl substituted piperidone, or a mixture thereof, about 0.2% to about 20% of one or more alkanolamines, and about 50% to about 94% of a sulfoxide, sulfoxone, or mixture thereof. Advantageously, the composition can remove copper from a copper substrate at a rate of less than about 10 Å per minute when the substrate is immersed in the composition which is held at 70° C. for 30 minutes and rotated relative to the composition at about 200 revolutions per minute.
REFERENCES:
patent: 5597678 (1997-01-01), Honda et al.
patent: 5612304 (1997-03-01), Honda et al.
patent: 6071868 (2000-06-01), Kim et al.
patent: 6638899 (2003-10-01), Wakiya et al.
PCT International Search Report, dated Oct. 24, 2002.
Small Robert J.
Zhou De-Ling
EKC Technology, Inc.
Morgan & Lewis & Bockius, LLP
Webb Gregory
LandOfFree
Sulfoxide pyrolid(in)one alkanolamine cleaner composition does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Sulfoxide pyrolid(in)one alkanolamine cleaner composition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sulfoxide pyrolid(in)one alkanolamine cleaner composition will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3376542