Sulfonium salts

Details Sulfonium salts Sulfonium salts

2008-07-08

2008-07-08

Habte, Kahsay T (Department: 1624)

Organic compounds -- part of the class 532-570 series

Organic compounds

Sulfur containing

C568S045000

Reexamination Certificate

active

07396960

ABSTRACT:
The present invention provides a sulfonium salt which can serve as a photo-acid-generator, the sulfonium salt not raising the problem of poor compatibility to a photoresist polymer having an acid-dissociable group. The sulfonium salt is represented by formula (1):wherein R1represents a linear or branched C2 to C9 divalent hydrocarbon group; each of R2to R5represents a hydrogen atom or a linear or branched C1 to C3 hydrocarbon group; each of R6and R7represents an organic group; R6and R7may be linked together to form a divalent organic group; and X−represents an anion.

REFERENCES:
patent: 4491628 (1985-01-01), Ito et al.
patent: 6395450 (2002-05-01), Park et al.

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