Sulfonium salt compound

Details Sulfonium salt compound Sulfonium salt compound

2005-08-02

2005-08-02

Berman, Susan (Department: 1711)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Compositions to be polymerized by wave energy wherein said...

C522S031000, C522S057000, C522S150000, C522S160000, C522S113000, C430S270100, C430S281100, C430S170000

Reexamination Certificate

active

06924323

ABSTRACT:
A compound shown by the general formula [1](wherein R1, R2and R3are each independently an aromatic hydrocarbon residual group, Yn−is an anion derived from a carboxylic acid having 3 or more carbon atoms with substituted fluorine atoms, and n is 1 or 2, provided that R1, R2and R3each is not a phenyl group having substituents at an ortho and/or a meta position), and a composition consisting of the compound and a diazodisulfone compound are disclosed. Use of the compound or the compound as an acid generator for resists produces the effects of improving the profiles of ultra-fine patterns or diminishing sidewall irregularities in ultra-fine patterns. The compound is also useful as a cationic photopolymerization initiator.

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Derwent WPI—English abstract of JP 51-56885 A, dated May 18, 1976.

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