Organic compounds -- part of the class 532-570 series – Organic compounds – Amino nitrogen containing
Patent
1995-01-27
1996-10-29
Burn, Brian M.
Organic compounds -- part of the class 532-570 series
Organic compounds
Amino nitrogen containing
4302701, 522 31, 548556, 548570, C07C21748
Patent
active
055697844
ABSTRACT:
A novel sulfonium salt having at least one substituted aromatic group having acid labile groups and at least one nitrogenous aromatic group is provided. A chemically amplified, positive resist composition comprising the sulfonium salt as well as an alkali soluble resin and a dissolution inhibitor in an organic solvent has solved the PED problem.
REFERENCES:
European Search Report dated Jun. 28, 1995.
A. Michaelis, et al., Berichte der Deutschen Chemischen Gesellschaft, vol. 24, pp. 757-764 (1891).
Ishihara Toshinobu
Maruyama Kazumasa
Ohsawa Youichi
Shimada Junji
Takemura Katsuya
Burn Brian M.
Shin-Etsu Chemical Co. , Ltd.
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