Sulfonium salt and its manufacturing method

Details Sulfonium salt and its manufacturing method Sulfonium salt and its manufacturing method

1998-08-27

2000-08-29

Vollano, Jean F.

Organic compounds -- part of the class 532-570 series

Organic compounds

Sulfur containing

568 18, 568 29, 568 28, C07C31500

Patent

active

061111430

ABSTRACT:
This invention relates to a sulfonium salt, including its manufacturing method, which is effectively used as a photoacid initiator or radical photoinitiator during polymerization and a photoacid generator, leaving the protection groups of organic compounds, especially as an useful photoacid generator of the chemically amplified photoresist employed in semiconductor materials. Since the sulfonium salt of this invention, so prepared via one-step reaction between sulfoxide compound and aromatic compound in the presence of perfluoroalkanesulfonic anhydride, has the advantages in that by overcoming some shortcomings of the prior art to prepare the sulfonium salt via two steps using Grinard reagent, this invention may provide a novel sulfonium salt with higher yield which cannot be achieved in the prior art and also to prepare even any conventional sulfonium salt having better yield.

REFERENCES:
patent: 4120866 (1978-10-01), Winkler
patent: 4246259 (1981-01-01), Kathawala
patent: 4786441 (1988-11-01), Miller
patent: 5274148 (1993-12-01), Dougherty et al.
patent: 5633409 (1997-05-01), Watanabe
patent: 5705702 (1998-01-01), Osawa
"The Preparation of Triarylsulfonium Halides by the Action of Aryl Grignard Reagents on Diphenyl Sulfoxide," Bernard S. Wildi et al., pp. 1965-1967, vol. 73, May 1951.
"Photochemistry of Triarysulfonium Salts," John L. Dektar et al., pp. 6014-6015, J. Am. Chem. Soc., vol. 112, No. 16, 1990.
"Deoxygenation of Sulfoxides Promoted by Electrophilic Silicon Reagents: Preparation of Aryl-Substituted Sulfonium Salts," R.D. Miller et al., J. Org. Chem. 1988, 53, pp. 5571-5573.
CA:87:134348 abs of Chem Lett by Minato, (6) pp. 609-614, 1977.
Angewandte Chem International English addition vol. 19, No. 3 by Effenberger pp. 151-171, 1980.
Tetrahedron Letters No. 4 by Hendrickson pp. 277-280, 1975.
Chem. Pharm. Bull vol. 29 No. 12 by Endo pp. 3753-3755, 1981.
CA:119:180471 abs Res Disclos. by Anon 350, 390, 1993.
CA:120:232097 abs of JP05255240, 1992.
CA:113:58341 abs of J Am Chem Soc 112 (16) By Dektar pp. 6004-6015, 1990.
CA:115:193968 abs of Proc. SPIE-Int. Soc. Opt. Eng., 1466(Adv. Resist Technoll. process.8)by Schwartz et al pp. 26-38, 1991.

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