Sulfonate salts and derivatives, photoacid generators,...

Details Sulfonate salts and derivatives, photoacid generators,... Sulfonate salts and derivatives, photoacid generators,...

2011-03-09

2011-10-04

Sullivan, Peter O (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Sulfonic acids or salts thereof

C562S112000

Reexamination Certificate

active

08030515

ABSTRACT:
Sulfonate salts have the formula: HOCH2CH2CF2CF2SO3−M+wherein M+is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oxime sulfonates and sulfonyloxyimides derived from these salts are effective photoacid generators in chemically amplified resist compositions.

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