Suction device

Details Suction device Suction device

1989-01-05

1990-02-27

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

29743, B25J 1506

Patent

active

049040120

ABSTRACT:
Suction device for handling a semiconductor wafer comprises a handling section having a plurality of suction ports opened in the same plane as the surface of the wafer and located within an area smaller than that of the surface of the wafer, a pressure reduction device connected to the suction port, an opening acts to release negative pressure produced by the pressure reduction device when a finger is released therefrom, and a grip integrally coupled to the handling section.

REFERENCES:
patent: 1302028 (1919-04-01), Fuchs et al.
patent: 2916059 (1959-12-01), Wong
patent: 3224106 (1965-12-01), Way
patent: 3466079 (1969-09-01), Mammel
patent: 3517958 (1970-06-01), Boucher et al.
patent: 3523706 (1970-08-01), Logue
patent: 3608946 (1971-09-01), Erickson et al.
patent: 4050729 (1977-09-01), Hutson
patent: 4618178 (1986-10-01), Hutson et al.
patent: 4735449 (1988-04-01), Kuma

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