Suction adhesion-type holder

Details Suction adhesion-type holder Suction adhesion-type holder

1991-11-15

1994-04-26

Yuen, Henry C.

Heating

Heat applicator having structure for mounting it on or...

432253, 168900, F27D 500

Patent

active

053061390

ABSTRACT:
A suction adhesion-type holder used, for example, in a bonding machine including an air cooling device provided between a bonding stage and a vacuum pump that creates a vacuum suction in the bonding stage through the cooling device. Air suction holes formed in the bonding stage, that has a heating element, are connected to the air cooling device via a pipe and air heated by the bonding stage is cooled in the air cooling device when the heated air flows in a spiral pipe installed inside the cooling device and then sucked into the vacuum pump. The spiral pipe is cooled by a fan.

REFERENCES:
patent: 4483392 (1984-11-01), Korsmo et al.
patent: 4513813 (1985-04-01), Zanobini
patent: 4657070 (1987-04-01), Kluppel
patent: 4721462 (1988-01-01), Collins, Jr.
patent: 4867231 (1989-09-01), Bottum
patent: 4872835 (1989-10-01), Tullis et al.
patent: 4874035 (1989-10-01), Kashiwada et al.

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