Fluid sprinkling – spraying – and diffusing – With cleaning means – drip collecting – waste disposal or soil... – Nozzle cleaner – flusher or drainer
Patent
1998-02-18
1999-07-06
Kashnikow, Andres
Fluid sprinkling, spraying, and diffusing
With cleaning means, drip collecting, waste disposal or soil...
Nozzle cleaner, flusher or drainer
239106, 222571, 251 635, 251331, B05B 1502
Patent
active
059188103
ABSTRACT:
A suck back valve is proposed which prevents displacement of a diaphragm due to pressure of a supply fluid, together with alleviating concern of changes in the amount of supply fluid which is to be sucked, and enabling ease of installation by making compact the system which employs the suck back valve. A diaphragm is displaced in the direction of arrow A under an activation operation of a linear voice coil type luffing device. Compressed air is introduced into a chamber, wherein the diaphragm is supported under an applied pressure. A coating liquid which is introduced through a fluid passage is supplied onto a semiconductor wafer from a nozzle. When an ON/OFF valve is activated and supply of the coating liquid is prevented, together with activating the linear voice coil luffing device and causing displacement of a plunger in the direction of arrow B, a poppet valve is displaced so that compressed air inside the chamber is output from a fluid output passage. Upon further displacement of the plunger the diaphragm is displaced, whereby the coating liquid is sucked, and any coating liquid in the nozzle is returned in the direction of arrow D.
REFERENCES:
patent: 3895748 (1975-07-01), Klingenberg
patent: 4394945 (1983-07-01), Taylor, Jr.
patent: 4597719 (1986-07-01), Tano
patent: 5134962 (1992-08-01), Amada et al.
patent: 5423482 (1995-06-01), Mueller et al.
Fukano Yoshihiro
Maruyama Tetsuro
Ganey Steven J.
Kashnikow Andres
SMC Kabushiki Kaisha
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