Successive fringe detection position interferometry

Details Successive fringe detection position interferometry Successive fringe detection position interferometry

1990-08-08

1991-05-28

Turner, Samuel

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, 356363, G01B 902

Patent

active

050188623

ABSTRACT:
A stable single-frequency laser interferometer comprises a Michelson interferometer having a power stabilized single-frequency laser and a dual light sensor comprising two closely spaced very small sensor surfaces mounted in substantially the same plane. Devices rotate the plane of the dual light sensor and/or elements of the interferometer to adjust the effective convergent angle of the recombining beams to have a sufficiently large effective convergent angle to promote stability and so that the output signals of the two sensors are in phase quadrature.

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patent: 4360271 (1982-11-01), Downs et al.
patent: 4671656 (1987-06-01), Auth
patent: 4776698 (1988-10-01), Crosdale
patent: 4819246 (1989-04-01), Aiello et al.
"Accuracy Analysis and Improvements to the Hewlett-Packard Laser Interferometer System", C. Steinmetz, R. Burgoon, J. Herris, SPIE vol. 816, Interferometric Metrology (1987) pp. 79-94.

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