Subtrate processing apparatus and device for and method of excha

Details Subtrate processing apparatus and device for and method of excha Subtrate processing apparatus and device for and method of excha

1995-06-07

1996-11-05

Housel, James C.

Coating apparatus

Projection or spray type

Rotating work

414222, 414217, 414935, 414936, 414940, B05C 1302

Patent

active

055713254

ABSTRACT:
A substrate processing apparatus comprises a processing part and a transferring part. In the processing part there are a plurality of stages in which a plurality of processing units are arranged in a row along a horizontal direction and the stages are arranged in a stack vertically. Thus, the processing units are arranged in matrix. The transferring part includes a plurality of horizontal transferring devices each movable in the horizontal direction and a vertical transferring device movable in the vertical direction. Hence, a substrate is movable both horizontally and vertically to be transferred to the desired processing unit.

REFERENCES:
patent: 4981408 (1991-01-01), Hughes et al.
patent: 4985722 (1991-01-01), Ushijima et al.
patent: 5032052 (1991-07-01), Swain
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5100516 (1992-03-01), Nishimura et al.
patent: 5145303 (1992-09-01), Clarke
patent: 5275709 (1994-01-01), Anderle

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