Subsurface imaging using an electron beam

Details Subsurface imaging using an electron beam Subsurface imaging using an electron beam

2008-06-17

2008-06-17

Vanore, David A. (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492210

Reexamination Certificate

active

07388218

ABSTRACT:
A method of navigating or endpointing a microscopic structure by subsurface imaging using a beam of electrons having sufficient energy to penetrate the surface and produce a subsurface image. For endpointing, when the subsurface image become relatively clear at a known electron energy, a user knows that he is approaching the buried feature. For navigating, a subsurface image can be formed of fiducials or other features to determine the position of the beam on the device.

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