Substrate with a piezoelectric thin film

Details Substrate with a piezoelectric thin film Substrate with a piezoelectric thin film

2011-08-23

2011-08-23

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S330000, C310S346000

Reexamination Certificate

active

08004163

ABSTRACT:
A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO3with a perovskite structure. A curvature radius of a warping of the substrate provided with the piezoelectric thin film due to difference between the first and the second thermal expansion coefficients is 10 m or more at room temperature. The piezoelectric thin film has a thickness of 0.2 μm to 10 μm. The piezoelectric thin film is oriented in one of plane orientations (001), (110), and (111).

REFERENCES:
patent: 2976246 (1961-03-01), Egerton et al.
patent: 5796152 (1998-08-01), Carr et al.
patent: 7267840 (2007-09-01), Ohnishi et al.
patent: 7323806 (2008-01-01), Shibata et al.
patent: 7372191 (2008-05-01), Ohmori et al.
patent: 7443080 (2008-10-01), Yoshioka et al.
patent: 7652412 (2010-01-01), Nihei
patent: 7701121 (2010-04-01), Oka et al.
patent: 7710003 (2010-05-01), Shibata et al.
patent: 2004/0012308 (2004-01-01), Riedel
patent: 2004/0070314 (2004-04-01), Yoon et al.
patent: 2004/0214723 (2004-10-01), Nonoyama et al.
patent: 2007/0126313 (2007-06-01), Ueno et al.
patent: 2007/0228874 (2007-10-01), Nagaya et al.
patent: 2006-291332 (2006-10-01), None
patent: 2007-19302 (2007-01-01), None

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